Acoustoelectric Effect in Semiconductor Structures - Tool for Interface States Investigation by Complex Acoustic Spectroscopy
The acoustoelectric effect resulting from the interaction between longitudinal acoustic wave and semiconductor interface has been proved to be a useful tool for the experimental study of interface states in semiconductor structures. The acoustic (acoustoelectric) deep-level transient spectroscopy (A-DLTS) technique based on the acoustoelectric effect was developed. The method uses an acoustoelectric response signal (ARS) produced by the structure interface when a longitudinal acoustic wave propagates through the structure. The bias voltage excitation pulses are then used to change the space charge distribution to measure ARS transients. Another introduced technique of acoustic spectroscopy to study interface states in MOS structures with a very thin oxide layer based on the acoustoelectric effect uses the measurement of the ARS as a function of gate voltage (Uac – Ug characteristics) to the determination of interface states distribution. The essential principles and theoretical background of these acoustic spectroscopy techniques that can determine the interface states parameters from the measured acoustoelectric transients and the dependence of the acoustoelectric response signal as a function of gate voltage are described. The results obtained on the representative set of MOS structures prepared on both nand p-type Si substrates demonstrate that the introduced technique of acoustic spectroscopy can be a very useful tool for the interface states characterization.
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Document Type: Research Article
Publication date: 01 July 2016
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- Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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