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Surface Acoustic Waves Propagation in Epitaxial ZnO/α-Al2O3 Thin Film

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In this work, we report the studies on piezoelectric properties of epitaxial ZnO thin films grown on R-Al2O3 and C-Al2O3 substrates using plasma-assisted molecular beam epitaxy (MBE). The resulting relationships are found with φ-scans and X-ray diff raction. The epitaxial relationship for ZnO films on R-Al2O3 and C-Al2O3 substrates are found to be (1120)[0001]ZnO//(0112)[0111]R–AL2O3 and (0001)[1010]ZnO//(0001)[2110]C–AL2O3, respectively Appropriate dispersion curves relative to Rayleigh waves, for both configurations ZnO/R-Al2O3 and ZnO/C-Al2O3 have been recorded in the frequency range up to 200 MHz utilizing laser ultrasonic equipment. Surface acoustic wave (SAW) propagation in piezoelectric media is basically achieved by the use of the ordinary diff erential equations method ODE, the generalized stiff ness matrix method GSMM and Green's function. These methods are reformulated with respect to the existing decoupling between the sagittal-plane displacement and the transverse displacement with respect to the electric potential. SAW properties, including dispersion curves and electromechanical coupling factor, are characterized. The cut-off velocity of the higher Rayleigh mode for both configurations is diff erent from the corresponding transverse bulk wave. The adopted elastic constants during numerical simulations are obtained from the literature. The positive sign of the elastic coefficient C14 of sapphire has been adjusted on the basis of ultrasonic measurements. The obtained results set guidelines for the design of high-frequency and low-loss SAW devices.
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Document Type: Research Article

Publication date: March 1, 2012

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  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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