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On the Modelling of Clamped Plates Loaded by a Squeeze Fluid Film: Application to Miniaturised Sensors

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In order to accurately describe the processes involved in the motion of a membrane loaded by a squeeze fluid film, it is necessary to have solutions for both the membrane and the fluid film which account for their strong coupling. The dynamic solution approaches presented here include the effects of the bending stiffness of the membrane (assumed to be a clamped square plate) and the motion of the thin air film between the membrane and the backing wall, assuming realistic boundary conditions at its periphery. The mode shapes are predicted accurately for both the plate and the air film, and the approach followed includes their strong coupling. Owing to the accuracy of the method, there are applications in the characterisation of the properties of square microphones (those miniaturised on silicon chip) as shown at the end of the paper. Actually, the method would be useful for other applications which involve rectangular or square plates coupled to resistive and reactive squeeze fluid films, including or not an in-plane tension.
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Document Type: Research Article

Publication date: September 1, 2010

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  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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