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Electrostatic Transducer with Square Membrane and Non-Planar Back Plate: Simplified Model

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This paper aims at providing generalized lumped-element circuits for the modelling of electrostatic microphones with non planar smooth backing electrode. These transducers consist of a circular membrane (or square membrane when fabricated using etching processes), a backing, non planar electrode without holes, both being separated by a thin fluid-gap, the fluid being enclosed in a peripheral reservoir beyond this fluid-gap. The modelling is a generalisation of the classical models: it includes a generalized mechanical impedance of the membrane, and an adapted approach to derive separately both a generalized reactance and a generalized resistance due respectively to the compressibility and the viscosity of the fluid-gap (beyond the inertia). Finally, theoretical results on the sensitivity of miniaturised microphones as a function of the frequency are provided and discussed.
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Document Type: Research Article

Publication date: September 1, 2009

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  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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