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Micromechanical Piezoelectric Actuator for Hearing Aid Application

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This paper reports on piezoelectric monomorph transducers that have been designed and manufactured using silicon bulk micromachining. The implementation of various concepts and the results of experimental investigations are described. The transducers considered in this work consist of clamped compound diaphragms with piezoelectric PZT layers and corresponding electrodes. The diaphragms of 1 to 9mm2 size are displaced applying the inverse piezoelectric effect. With the largest transducers, centre deflections of 60 nm/V could be achieved (free field conditions, quasi static region). The corresponding volume changes generate sound pressures of 20 mPa/V (equal to 60 dB SPL at 1 V) in a 2cm3 coupler.
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Document Type: Research Article

Publication date: September 1, 2004

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  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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