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Scanning Electron Microscopy Visualization of Surface Acoustic Wave Propagation in a LiNbO3 Crystal

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Experimental investigations of the surface acoustic wave propagation in the LiNbO3, crystal by the scanning electron microscopy method are performed. The surface acoustic wave radiation patterns are observed using a scanning electron microscopy voltage contrast method. A possibility to measure the surface acoustic wave velocity in the scanning electron microscope is presented.


Es wurden experimentelle Untersuchungen der Ausbreitung akustischer Oberflächenwellen in einem LiNbO3-Kristall mit Hilfe der Rasterelektronenmikroskopie durchgefährt. Die Wellenfelder der Oberflächenwellen wurden mit Hilfe einer Kontrastmethode beobachtet. Es wird eine Möglichkeit zur Messung der Geschwindigkeit akustischer Oberflächenwellen mit dem Rasterelektronenmikroskop vorgestellt.


On a étudié expérimentalement la propagation d'ondes acoustiques de surface dans un cristal de LiNbO3 a l'aide d'un microscope électronique à balayage. Pour visualiser les diagrammes de rayonnement de ces ondes, nous avons utilisé une technique de contraste de tension. Nous indiquons également une approche possible pour la mesure de la vitesse des ondes acoustiques de surface.
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Document Type: Research Article

Publication date: March 1, 1995

More about this publication?
  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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