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Improved H2S Sensitivity of Cobalt Phthalocyanine Film Fabricated on Plasma Treated Flexible Polyethylene terephthalate Substrate

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In this study, we demonstrate the enhanced H2S sensitivity of cobalt phthalocyanine (CoPc) film by utilizing Ar + O2 plasma treated nanoporous surface formed on polyethylene terephthalate (PET). Field emission scanning electron microscopy results confirm the formation of nanoporous surface on PET substrate. The gas sensing properties of CoPc film of thickness 30 nm deposited on the plasma treated PET (CoPc-Treated film) were studied at room temperature and compared with CoPc film grown on untreated PET (CoPc-Untreated film). Sensitivity values were found to be ∼900 and 1300% (for 20 ppm) for CoPc-Untreated and CoPc-Treated films, respectively. This enhanced sensitivity is attributed to porous-like surface of CoPc-Treated film, as it provides the large surface area for the gas adsorption as compared to CoPc-Untreated film. The Elovich equation was employed for the chemical adsorption of H2S on CoPc-Treated film surface. Moreover, electrical properties of CoPc-Treated film were studied under various bending conditions, which showed its strong potential for making the flexible and light weight gas sensor.
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Keywords: ELOVICH EQUATION; FLEXIBLE GAS SENSORS; PHTHALOCYANINE; POROUS

Document Type: Research Article

Publication date: 01 February 2017

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