Elaboration and Characterization of Ca Doped ZnO Films Prepared by rf-Magnetron Sputtering at Room Temperature
In this work, we studied calcium doped zinc oxide (ZnO:Ca) thin films deposited by rf-magnetron sputtering at room temperature using calcium doped nanocrystalline powder synthesized by sol–gel method. The calcium doping concentration was varied from 2.0 to 4.0 at.%. The structural characteristics of the films were investigated by X-ray diffractometry, scanning electron microscopy and atomic force microscopy, while the electric and optical properties of the films were studied by the Hall measurement and optical spectroscopy, respectively to explore the possibility of producing transparent conductive oxide films through low-cost process. It has been found that all of the films deposited were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity obtained in this study was 2.34 × 10−3 Ω·cm for ZnO:Ca films containing 3.0 at.% of calcium. Optical transmittance measurement results show a good transparency within the visible wavelength range for all the films.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
Document Type: Research Article
Publication date: December 1, 2011
More about this publication?
- The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites