Skip to main content
padlock icon - secure page this page is secure

Sensing Behavior of TiO2 Thin Film Prepared by r.f. Reactive Sputtering

Buy Article:

$106.51 + tax (Refund Policy)

TiO2 thin films were fabricated by the r.f. reactive sputtering method at a deposition rate of approximately 1 nm/min. As-deposited thin films were amorphous and they crystallized to anatase and rutile after annealing at two different temperatures, 800 and 1000 °C, respectively. The film was determined to be continuous and dense based on SEM observation. Films of thickness of 90 nm, 300 nm, and 500 nm were deposited on an alumina substrate with Au electrodes to investigate the relationship between the thickness and the sensitivity. Gas sensing tests were performed on these films at two different temperatures (550 and 650 °C) and under various CO concentrations (250–1000 ppm). The maximum sensitivity was observed for a thickness comparable to the Debye length (∼300 nm). The proposed simple model agrees with the trend in the experimental results.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: December 1, 2008

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more