Skip to main content
padlock icon - secure page this page is secure

A Micro-Electromechanical System Based Hydrogen Gas Sensor

Buy Article:

$106.34 + tax (Refund Policy)

We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50∼20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10−3 K−1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 m.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: December 1, 2008

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more