Effects on Transparent Conductive Properties of the Indium Tin Oxide Films Deposited on Flexible Polyimide Substrates
Indium tin oxide (ITO) films were deposited on flexible polyimide (PI) substrates by DC magnetron sputtering. The photo-electrical properties of ITO films were tested by probe step meter, hall test, ultraviolet visible spectrophotometer, X-ray diffraction (XRD) and atomic force microscopy
(AFM). The results show that the transparent conductivity of ITO films is mainly influenced by the sputtering power and deposition pressure, which were investigated systematically. High quality photoelectric performance transparent ITO films with the average transmittance in the visible region
is 86% and the resistivity of the as-grown films is 3.1×10–4 Ω·cm. And the as-grown films were deposited at the optimized process conditions of the 100 W with sputtering power and 0.4 Pa with deposition pressure.
Keywords: FLEXIBLE SUBSTRATE; ITO TRANSPARENT CONDUCTIVE FILM; MAGNETRON SPUTTERING; POLYIMIDE (PI)
Document Type: Research Article
Publication date: 01 April 2019
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