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A Thermal Physics Model of Continuous Wave Laser Irradiation of SiO2/Ge/Sapphire Epitaxial Films

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Laser recrystallization technology provides an effective way to fabricate high quality single crystalline germanium (Ge) on sapphire. In this work, a thermal physics model of continuous wave (CW) laser irradiation of SiO2/Ge/Sapphire epitaxial films is established and the temperature distribution of the whole system is discussed to better understand this process. Optical parameters such as reflectivity, transmissivity, and absorption rate of the studied thin films irradiated by 808 nm continuous wave laser are studied by finite-difference timedomain (FDTD) simulation. We have evaluated the temperature profile of the SiO2/Ge/Sapphire epitaxial films using a finite element simulation based on solving the general heat equation using COMSOL Multiphysics. Some main process parameters such as the laser power, the initial temperature and the effective beam radius have been varied to precisely control the temperature distribution of the epitaxial films and to optimize the process. The obtained results of our study will provide theoretical guidance for the fabrication of high quality single crystalline Ge on sapphire by laser recrystallization technology.
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Keywords: COMSOL MULTIPHYSICS; LASER RECRYSTALLIZATION; SIO2/GE/SAPPHIRE EPITAXIAL FILMS; TEMPERATURE DISTRIBUTION; THERMAL PHYSICS MODEL

Document Type: Research Article

Publication date: October 1, 2018

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  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
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