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Structure and Mechanical Properties of (AlCrNbSiTiV)N Thin Films Deposited Using Reactive Direct Current Magnetron Sputtering

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High quality (AlCrNbSiTiV)N high entropy alloy nitride thin films are prepared using reactive direct current (dc) magnetron sputtering. The effect of substrate bias (from 0 to –200 V) on the microstructure, mechanical properties and the performance of cutting tools that are coated with the (AlCrNbSiTiV)N films were investigated. The microstructures are characterized using transmission electron microscopy, scanning electron microscopy and nano-indentation techniques. This study deposited (AlCrNbSiTiV)N film with a thickness of 469.9∼366.2 nm. It is found that the films are homogeneous and very compact and that they adhere perfectly to the substrate, and the Rockwell indentation results belong to HF1. The coated films are studied using scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM), and a nanoindenter. As the substrate bias is increased from 0 V to –100 V, the elastic recovery and the hardness of the (AlCrNbSiTiV)N film increases, but further increases in the substrate bias voltage results in a decrease in these values. After dry turning using a cermet cutter inserts that is coated in a (AlCrNbSiTiV)N film, the surface roughness of the work-piece and the flank wear for a cermet cutter are significantly reduced.
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Keywords: HIGH ENTROPY ALLOYS; MECHANICAL ROPERTIES; SUBSTRATE BIAS VOLTAGE; TEM

Document Type: Research Article

Publication date: September 1, 2018

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  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
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