Skip to main content
padlock icon - secure page this page is secure

A Study on Chemical and Mechanical Properties of NiCrSn Films for Flexible Copper Interconnect

Buy Article:

$106.64 + tax (Refund Policy)

In this work, both the adhesion properties and chemical properties of new NiCrSn alloys as a copper diffusion barrier layer on polymer substrates were examined using micro-scratch tests. The metal/polymer interfaces were examined using auger electron spectroscopy and X-ray photoemission spectroscopy. Compared to Ni-20 at% Cr alloy, the Ni-16 at% Cr-4 at% Sn alloy films have higher values of adhesion forces than that of Ni-20 at% Cr. In addition, the Ni-16 at% Cr-4 at% Sn alloy shows better wet pattering performance without remaining etch residue after wet pattering in 33% FeCl3 wet etchant. Such tendencies were explained in terms of the different types of metal oxide compounds forming at the metal/polymer interfaces which are dependent on the barrier metal's composition.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: April 1, 2016

More about this publication?
  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more