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Aerosol-Deposited (Ba, Sr)TiO3 Thick Films Prepared by Rapid Thermal Annealing for Microwave Applications

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Barium strontium titanate (BST; Ba0.5Sr0.5TiO3) thick films were successfully deposited on a Cu substrate by the aerosol deposition (AD) process in the room temperature range. The aerosol-deposited BST thick films were annealed in pure O2 and N2 atmospheres at 100, 200, and 300 °C by the rapid thermal annealing (RTA) process. A sandwich-type vertical capacitive structure was fabricated on the BST thick films to obtain dielectric properties. It was found that the aerosol-deposited BST thick films had a very dense structure and good adhesion. The difference between the effects of O2 and N2 atmospheres on the electrical behavior of the BST thick films was investigated after RTA. Analysis of the X-ray diffraction (XRD) patterns of the films showed that the aerosol-deposited BST thick films had a perovskite structure without any secondary phases. The relative permittivity and loss tangent of the as-deposited BST thick films were 83 and 0.02, respectively, at 1 MHz. In addition, after the RTA process in O2 and N2 atmospheres, the relative permittivities of the BST thick films increased.
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Keywords: AEROSOL DEPOSITION; BST; RAPID THERMAL ANNEALING

Document Type: Research Article

Publication date: April 1, 2016

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  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
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