Skip to main content
padlock icon - secure page this page is secure

Aerosol-Deposited (Ba, Sr)TiO3 Thick Films Prepared by Rapid Thermal Annealing for Microwave Applications

Buy Article:

$106.64 + tax (Refund Policy)

Barium strontium titanate (BST; Ba0.5Sr0.5TiO3) thick films were successfully deposited on a Cu substrate by the aerosol deposition (AD) process in the room temperature range. The aerosol-deposited BST thick films were annealed in pure O2 and N2 atmospheres at 100, 200, and 300 °C by the rapid thermal annealing (RTA) process. A sandwich-type vertical capacitive structure was fabricated on the BST thick films to obtain dielectric properties. It was found that the aerosol-deposited BST thick films had a very dense structure and good adhesion. The difference between the effects of O2 and N2 atmospheres on the electrical behavior of the BST thick films was investigated after RTA. Analysis of the X-ray diffraction (XRD) patterns of the films showed that the aerosol-deposited BST thick films had a perovskite structure without any secondary phases. The relative permittivity and loss tangent of the as-deposited BST thick films were 83 and 0.02, respectively, at 1 MHz. In addition, after the RTA process in O2 and N2 atmospheres, the relative permittivities of the BST thick films increased.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: April 1, 2016

More about this publication?
  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more