Enhancement of the Endurance against Mechanical Deformation of Metal Lines on Flexible Polyimide Substrate
We investigated and compared the mechanical properties between metal lines fabricated on the untreated and those of the plasma-treated surface of polyimide film. Various investigation methods were utilized for the evaluation of the mechanical properties. In addition to scratch test and bending test, we also performed folding test. Metal lines were folded and unfolded with the substrate and then the folded region was observed by scanning electron microscope. In the case of the untreated sample, significant wrinkles and peeling were clearly observed at the folded region. However, the plasma-treated sample showed only fine line defects. It can be deduced that the mechanical deformation is related to the adhesion property of the metal film and the plasma treatment on polyimide surface can enhance the adhesion properties of metal lines.
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Document Type: Research Article
Publication date: April 1, 2016
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