Skip to main content
padlock icon - secure page this page is secure

Epitaxial Growth of Perovskite (Ba, Sr)TiO3 Thin Films on Silicon

Buy Article:

$106.73 + tax (Refund Policy)

Epitaxial (Ba0.5, Sr0.5)TiO3 (BST) and yttria stabilized zirconia (YSZ) thin films have been grown by pulsed-laser deposition (PLD) on silicon substrate. It is found that very thin YSZ buffer layer yields the epitaxial growth of BST thin films on Si. Low ambient oxygen pressures are required for growing the YSZ buffer layer whereas the ambient oxygen pressure does not influence the epitaxial growth of BST films. In these double heteroepitaxial structures, the axial relationship is BST[200]/YSZ[200]/Si[100]. As the YSZ buffer layer becomes thicker than 10 nm, the BST films exhibits a polycrystalline nature. Moreover, BST films experienced lattice distortion along the in-plane and surface normal directions due to the stress induced primarily by thermal stress during deposition.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: January 1, 2015

More about this publication?
  • Science of Advanced Materials (SAM) is an interdisciplinary peer-reviewed journal consolidating research activities in all aspects of advanced materials in the fields of science, engineering and medicine into a single and unique reference source. SAM provides the means for materials scientists, chemists, physicists, biologists, engineers, ceramicists, metallurgists, theoreticians and technocrats to publish original research articles as reviews with author's photo and short biography, full research articles and communications of important new scientific and technological findings, encompassing the fundamental and applied research in all latest aspects of advanced materials.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more