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Nanoindentation Study of FePt Thin Films Deposited by Radio Frequency Magnetron Sputtering

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The microstructural and nanomechanical properties of Fe0. 5Pt0.5 (FePt) thin films deposited on the glass substrates by radio frequency magnetron sputtering were investigated. Specifically, this study focused mainly on the effects of post-annealing on the evolvement of film microstructure and its correlation with the associated nano-mechanical properties. The X-ray diffraction (XRD) results indicated the FePt films were largely equiaxed with the average grain size being increased from ∼27 nm to ∼105 nm as the annealing temperature was raised from 400 °C to 700 °C. The associated film hardness and Young's modulus, as derived from the nano-indentation measurements, were decreased from 14.4 ± 6.8 GPa and 194.2 ± 9.1 GPa to 8.1 ± 0.2 GPa and 153.8 ± 6.5 GPa, respectively. The nano-mechanical properties of the present FePt films were well described by the Hall-Petch relation.
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Keywords: FEPT; HARDNESS; NANOINDENTATION; THIN FILMS

Document Type: Short Communication

Publication date: March 1, 2016

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  • Nanoscience and Nanotechnology Letters (NNL) is a multidisciplinary peer-reviewed journal consolidating nanoscale research activities in all disciplines of science, engineering and medicine into a single and unique reference source. NNL provides the means for scientists, engineers, medical experts and technocrats to publish original short research articles as communications/letters of important new scientific and technological findings, encompassing the fundamental and applied research in all disciplines of the physical sciences, engineering and medicine.
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