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Microstructure and Mechanical Properties of Mo–Zr–N Coatings

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Ternary Mo–Zr–N coatings with different Zr contents were fabricated by magnetron sputtering technique, and characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS). Nanoindenter and residual stress tester have also been employed to measure the mechanical properties including nanohardness and residual stress of Mo–Zr–N coatings. It is found that both Mo–N and Mo–Zr–N coatings exhibit a face centered cubic (fcc) structure. Ternary Mo–Zr–N coatings present an enhanced nanohardness compared with the binary Mo–N coatings, reaching the maximum hardness of 32 GPa at Zr content of 11.3 at.%. The residual stress of Mo–Zr–N coatings is compressive in nature and increases from 1.1 GPa to 2.1 GPa as the Zr content is increased from 0 to 18.1 at.%. The hardness evolution of Mo–Zr–N coatings with Zr content was investigated in details.
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Keywords: COATING; COMPRESSIVE STRESS; HARDNESS; MAGNETRON SPUTTERING; MO–ZR–N

Document Type: Short Communication

Publication date: April 1, 2015

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  • Nanoscience and Nanotechnology Letters (NNL) is a multidisciplinary peer-reviewed journal consolidating nanoscale research activities in all disciplines of science, engineering and medicine into a single and unique reference source. NNL provides the means for scientists, engineers, medical experts and technocrats to publish original short research articles as communications/letters of important new scientific and technological findings, encompassing the fundamental and applied research in all disciplines of the physical sciences, engineering and medicine.
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