Fabrication and Characterization of Low Temperature Acetone Sensor Using CuO Nanowires
In this work, we report fabrication of low-cost and high-efficiency acetone sensors capable of operating at relatively low temperatures. Copper oxide nanowires are grown on large area substrates at relatively low-temperature without using a catalyst or a seed layer. The copper oxide
nanowires have been used as sensing element. Copper oxide nanowires were formed on oxidized silicon substrates by oxidation of copper film, which was deposited by RF magnetron sputtering process. Copper film of about 3 μm thickness was sputter deposited on this substrate using RF
sputtering technique. The synthesized CuO nanowires were polycrystalline and had diameter in the range of 50–200 nm and length up to 30 μm, as revealed by X-ray diffraction (XRD) analysis and scanning electron microscopy (SEM). For sensor fabrication, a two mask process and
photolithography technique was used. The copper oxide nanowires were used as sensing film. The sensor was tested for different volatile organic compounds like ethanol, methanol and butanol. The sensor showed high sensitivity of about 68% towards 100 ppm acetone vapors at operating temperature
as low as 50 °C. The dynamic response of the sensor was also studied. It was found that the sensor was sensitive and selective to acetone vapors and had fast response and recovery time at operating temperature of 50 °C.
Keywords: COPPER FILMS; COPPER OXIDE NANOWIRES; RF MAGNETRON SPUTTERING; X-RAY DIFFRACTION
Document Type: Short Communication
Publication date: 01 November 2011
- Nanoscience and Nanotechnology Letters (NNL) is a multidisciplinary peer-reviewed journal consolidating nanoscale research activities in all disciplines of science, engineering and medicine into a single and unique reference source. NNL provides the means for scientists, engineers, medical experts and technocrats to publish original short research articles as communications/letters of important new scientific and technological findings, encompassing the fundamental and applied research in all disciplines of the physical sciences, engineering and medicine.
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