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Open Access Improved nanomechanical properties of hydrogenated tetrahedral amorphous carbon films measured with ultra low indentation load

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This paper reports the nanomechanical properties of as grown and hydrogenated tetrahedral amorphous carbon (ta-C, ta-C: H) films deposited by S-bend filtered cathodic vacuum arc technique measured with 1.4 mN load. It has been found that the hydrogenation of ta-C film improved the nanomechanical properties. Maximum hardness (H) of 38.15 GPa (with improvement of ∼80%) has been obtained for ta-C: H film deposited at a hydrogen partial pressure of 1.4 × 10–1 Pa and maximum elastic modulus (E) value of 410.1 GPa has been obtained when the hydrogen partial pressure reduced to 7.4 × 10–3 Pa. The plastic index parameter (H/E) of ta-C: H film (0.11) is found to be superior to that of ta-C film (0.073), which is a measure of wear resistance for coating applications. The improved H/E of ta-C: H films may be due to the passivation of surface defects and favorable formation of sp3 hybridized bonds.

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Document Type: Research Article

Publication date: October 1, 2015

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