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Open Access Growth of indium nitride nanopetal structures on indium oxide buffer layer

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This paper presents a simple method for controlling crystalline quality and morphology of InN. A buffer layer of indium oxide is deposited in-situ on Si substrate before growing InN by atmospheric pressure-halide vapour phase epitaxy. Glancing angle X-ray diffraction and scanning electron microscopic studies have been carried out. Buffer layer of indium oxide helps in the growth of indium nitride nanopetals.
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Keywords: BUFFER LAYER; CHEMICAL VAPOUR DEPOSITION; INDIUM NITRIDE; INDIUM OXIDE; NANOPETALS

Document Type: Short Communication

Publication date: December 1, 2013

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