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Cr/C Reflective Multilayer for Wavelength of 44.8 Å

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The working wavelength of Ni-like, Ta soft X-ray laser is 44.8 Å, just near the “water window.” High reflection multilayers are required for this kind of laser in China. In this work, we design and fabricate carbon-based multilayer reflective samples. The Cr/C multilayer was selected from proposed candidates such as Co/C, Ni/C, and CoCr/C material combinations. The period thickness is only 22.6 Å. Cr/C multilayers were deposited by the magnetron sputtering method. Multilayers with bi-layer numbers of 150, 200, 250 and 300 were deposited onto super polished silicon wafers. All multilayers have been characterized by grazing incidence X-ray reflectance (GIXRR). Then, near-normal incidence reflectance measurements were performed at beamline 3W1B, Beijing synchrotron radiation (BSRF). The highest reflectance of 13.2% is achieved with the bi-layer number of 300. Transmission electron microscopy measurements also clearly show the sharp Cr–C interfaces in the multilayer.
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Keywords: Magnetron Sputtering; Multilayer; Reflectance; Soft X-ray Laser; Synchrotron Radiation

Document Type: Research Article

Affiliations: 1: Ministry of Education Key Laboratory of Advanced Micro-Structured Materials, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China 2: Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Science, Beijing 100049, China

Publication date: January 1, 2019

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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