Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength
We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for
one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the
underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5% at ≈6.66 nm, AOI =
77° off-normal was achieved, which was reduced by 0.5% absolute in half a year, due to contamination of the top B layer.
Keywords: 6.x Multilayer; EUV Optics; Grazing-Incidence; La Surface Nitridation; LaN/B; LaN/La/B; XUV Optics
Document Type: Research Article
Affiliations: Industrial Focus Group XUV Optics, MESA + Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
Publication date: 01 January 2019
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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