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Stress and Microstructure Study of W/Si X-ray Multilayers with Different Structural Parameters

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X-ray Timing and Polarimetry (XTP) telescope is proposed by using nested focusing optics with a large effective area for studies in the field of high energy physics (energy region of 1–30 keV). Highreflectance and low-stress W/Si multilayers are required for this telescope to improve the spectral response and maintain the figure quality of the mirrors simultaneously. In this paper, we focused on the study of stress and layer structure of W/Si periodic multilayers at different d-spacings (thickness of period), thickness ratios, and bilayer numbers. The results show that the stress of the multilayer increased from −73.3 to −465.5 MPa with increase in the d-spacing from 2.7 to 5.5 nm, while the change in the average interface width was negligible, from 0.31 to 0.36 nm. For the multilayers prepared with different thickness ratios of W, from 0.3 to 0.67 (d = 3.7 nm), the lowest stress appeared at the ratio of ~0.46, and the average interface width was unchanged. The number of bilayers (N = 80–160) had negligible effects on both the layer structure and the stress, and the multilayers exhibited a very smooth surface morphology with a root-mean-square roughness of 0.19 nm. To further study the microstructural changes of the multilayer, X-ray diffraction measurements of the samples with different d-spacings and thickness ratios were performed. An increased crystallization along with phase changes were observed in the samples prepared with thicker W layers, which can increase the compressive stress of the multilayer.
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Keywords: Crystallization; Interface Width; Stress; W/Si Multilayer; X-ray

Document Type: Research Article

Affiliations: MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

Publication date: January 1, 2019

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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