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Lifetime Stability and Microstructure Properties of Cr/B4C X-ray Reflective Multilayer Coatings

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This paper demonstrates that highly reflective Cr/B4C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B4C multilayers is also examined, with emphasis on the B4C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B4C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B4C layer structure.
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Keywords: Boron Carbide; Chrominum; Multilayers; Soft X-rays

Document Type: Research Article

Affiliations: 1: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA 2: Laboratoire Charles Fabry, Institut d’Optique Graduate School, CNRS, Universit√© Paris-Saclay, 91127 Palaiseau Cedex, France 3: Synchrotron SOLEIL, CNRS-CEA, L’Orme des Merisiers, Saint-Aubin-BP48, 91192 Gif-sur-Yvette, France 4: Center for X-ray Optics, Lawrence Berkeley National Lab, 2-400, Berkeley, California 94720, USA

Publication date: January 1, 2019

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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