Development of Vacuum Ultraviolet Emission Source Using a Cone-Shaped O2/He Hollow Cathode Discharge
A compact vacuum ultraviolet (VUV) lamp using helium and oxygen plasma has been developed to emit atomic oxygen triplet 3S1–3P2, 1, 0 lines, which can be applied to measure absolute oxygen density by a method of absorption spectroscopy.
The VUV lamp consists of a negatively biased micro-hollow cathode with a hole of 700 μm diameter and grounded hole-electrode carrying the gasses. The discharge was confined in the hollow cathode hole when the operating pressure was near 30 Torr in both the pure helium and helium
based oxygen diluted plasma. In this condition, the spectral lines of the atomic oxygen triplet emission (130.2, 130.5, 130.6 nm) were observed and the atomic excitation temperature showed higher value than that of a normal glow phase. Typical I–V characteristic of hollow cathode
mode such as negative resistivity was also discussed in both the helium and helium-oxygen discharge at the pressure of 30 Torr.
Keywords: Absorption Spectroscopy; Oxygen Radical Density; VUV Lamp; VUV Spectroscopy
Document Type: Research Article
Affiliations: Institute of Plasma Application, Chonbuk National University, 567 Baekje-Daero, Jeonju 54896, Republic of Korea
Publication date: 01 November 2017
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites
- Access Key
- Free content
- Partial Free content
- New content
- Open access content
- Partial Open access content
- Subscribed content
- Partial Subscribed content
- Free trial content