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Highly Soluble Fluorinated Molecular Imaging Material for Micropatterning of Organic Light-Emitting Diodes

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In this paper, we report a semi-perfluorinated molecular glass resist, RF-T-OtBoc, prepared from a semi-perfluoroalkyl epoxide and an amorphous phenol, α,α,α-tris(4-hydroxyphenyl)-1-ethyl-4-isopropylbenzene. The synthesis started by fixing perfluoroalkyl moieties onto an amorphous phenolic core, during which new secondary hydroxyl groups were generated by epoxide ring-opening reactions. The hydroxyl groups could then be employed to protect reactions with di-tert-butyl dicarbonate, which completed synthesis of a chemically amplified resist, RF-T-OtBoc. The fluorinated resist showed good solubility, as high as 20% (w/w), in fluorous solvents including HFE-7700, which is suitable for spin casting. Together with a fluorous solvent-soluble photoacid generator, thin films of RF-T-OtBoc can be patterned down to 10 μm-sized features under 365 nm UV exposure conditions. The fluorinated resist, fluorous solvents, and optimized processing parameters were successfully applied to micropatterning of green phosphorescent organic light emitting diode pixels to construct 30 μm pixels on an organic hole-transporting material film.
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Keywords: Fluorinated Molecular Glass; Orthogonal Photolithography; Ring Opening Reaction

Document Type: Research Article

Affiliations: 1: Department of Polymer Science and Engineering, Inha University, Incheon 402-751, Korea 2: Department of Materials Science and Engineering, University of Seoul, Seoul 130-743, Korea

Publication date: August 1, 2017

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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