Nanomechanical Analysis of a UV Treated Ag Thin Film Based on a Three-Step Oxidation Model
Nanoindentation was used as the main method to measure the change in nanomechanical properties on the surface of an Ag thin film due to UV treatment. The 4-point probe method, X-ray diffraction (XRD), and atomic force microscopy (AFM) were used to measure the electrical, crystallographic,
and morphological properties, respectively. During a UV treatment time of between 1 and 3 minutes, the sheet resistance increased dramatically to 0.55 Ω/sq. (the sheet resistance was 0.16 Ω/sq. prior to UV treatment) and these results were supported by a proportional decreased in
XRD intensity. Thereafter, the sheet resistance decreased and the XRD intensity increased in response to increases in UV treatment time. These results were related to a change in crystal structure from Ag to AgO
x
, which could also have caused the change in sheet resistance.
Based on these results, we propose a 3-step oxidation model of an Ag thin film according to UV treatment time. This proposal has been proven by nanoindentation testing.
Document Type: Research Article
Publication date: 01 March 2015
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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