Investigations of Porous Silicon with Deposited 3D-Metals by Auger- and Ultrasoft X-Ray Emission Spectroscopy
Nanocomposites based on porous silicon (Por-Si) with 3d-metals incorporated into pores can be used as magnetics. Por-Si layers were obtained by anodic etching of n-type silicon (100) with the use of HF solution in alcohol. Fe, Co, Ni galvanic deposition in por-Si was made from aqueous
solutions of corresponding sulphates. We have shown by USXES (Ultrasoft X-ray emission spectroscopy), and Auger spectroscopy that Fe covers the surface of porous silicon uniformly but Co penetrates into pores depth. And Ni nanoparticles similar to Co penetrate into pores depth. The obtained
Auger profiles of por-Si(Fe), por-Si(Co), por-Si(Ni) nanocomposites shown that its surface layers (to 40 nm) contain up to 10% Fe and no more than 1% Co and Ni, testifying about Co and Ni penetration into silicon pores depth.
Document Type: Research Article
Publication date: 01 November 2012
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