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Nanocrystalline Diamond Coating on Non-Planar Silicon Substrates

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Micro and nanosystems-based products will be an important contributor to the industrial and economic future, as a key value adding element for many sectors. The adoption of micro and nano manufacturing technologies making use of a variety of materials, components and knowledge based technologies will most probably provide functionality and intelligence to highly miniaturised systems. Chemical Vapour Deposited (CVD) diamond is a hard material of high mechanical strength and thermal stability and therefore an ideal candidate for microelectromechanical devices. The latter, is already being used to manufacture sensors, resonators, actuators, biological devices or even plastic moulding impressions, by depositing the film on a structured substrate, by selective growth of diamond on Si using SiO2 masks, or by pattern etching on oxygen-containing plasma. The diamond shaping may also be performed by a fine tuning of the nucleation and growth process. In this paper, it is presented the results of diamond coated structures and an evaluation of its morphology variation with the substrate configuration. The grown films were characterized for quality, surface roughness and microstructure using scanning electron microscopy, Raman and X-ray diffraction spectroscopy and surface profilometry.
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Document Type: Research Article

Publication date: August 1, 2012

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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