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Fabrication of Superhydrophilic Nanostructured Surface by Thermal Annealing of Titanium Thin Films in Air

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We report on a novel approach to fabricate a superhydrophilic titanium oxynitride surface by dc magnetron sputtering deposition followed by thermal annealing in air. The annealing was conducted in a furnace with no gas control at temperature ranging from 300–700 °C. The chemical composition and the morphology of the films have been investigated by contact angle measurements, optical absorption spectroscopy, X-ray photoemission spectroscopy, transmission electron microscopy and atomic force microscopy. The results reveal that the annealed films consist of a 5–10 nm thick capping titanium composite layer on top of a titanium metal layer. The nitrogen and oxygen composition of this capping layer can be tailored with the annealing temperature. The annealing process also produces nanoscale protrusions on the surface, yielding water contact angles of less than five degrees. This annealing approach in air is a simple yet versatile method, capable of producing nanostructure materials with potential applications in photocatalytic coating and semiconductor fabrication.
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Document Type: Research Article

Publication date: February 1, 2009

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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