Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique
This study aims to synthesize lead-free ferroelectric material, (Bi1/2Na1/2)TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400–600 °C and 30–90 min. (Bi1/2Na1/2TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35–162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6–16.8 μC/cm2, 325–350, respectively.
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Document Type: Research Article
Publication date: November 1, 2006
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