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Fabrication of Microfluidically-Accessible Planar Nanoholes on Elastomeric Substrates

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Here we present two novel fabrication techniques for creating planar nanohole devices designed for making measurements or delivering soluble compounds to a number of single cells simultaneously. The devices are micromolded in poly(dimethylsiloxane) (PDMS). In both designs presented here, the nanoholes are arranged in a linear array on a flat surface; each nanohole constitutes a fluidic connection or nanochannel between two volumes, one above the surface and a microfluidic channel beneath the surface dedicated to that nanohole. Cells can be immobilized and cultured on the planar array surface either directly on top of the nanoholes or in close proximity. The integration of nanochannels at the terminal end of an underlying microchannel network provides nanometer-scale precision and favorable optical properties while allowing for low fluidic and electrical resistance.
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Keywords: BIOMEMS; ELECTRON-BEAM LITHOGRAPHY; MICROFLUIDICS; NANOAPERTURE; NANOHOLE; SOFT LITHOGRAPHY

Document Type: Research Article

Publication date: December 1, 2005

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  • Journal of Biomedical Nanotechnology (JBN) is a peer-reviewed multidisciplinary journal providing broad coverage in all research areas focused on the applications of nanotechnology in medicine, drug delivery systems, infectious disease, biomedical sciences, biotechnology, and all other related fields of life sciences.
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