Modeling and Analysis of High Sensitive MEMS Capacitive Differential Pressure Sensor with Polymide Diaphragm
This paper reports on modeling of high sensitive capacitive differential pressure sensor without and with bossed polymide diaphragm membrane. Analysis was carried out for center deflection sensitivity, capacitive sensitivity, effect of temperature on center deflection and capacitive sensitivity to use this sensor for the aircraft altimeter. A novel and simple structure to produce high sensitive diaphragm modeling was proposed. Capacitive differential pressure sensor principle was used in this work, where as others work reports absolute pressure sensor. The fabrication process flow of CDPS was also explained. This sensor is analyzed with constant temperature and real time parameters of pressure and temperature for aircraft flying altitude. The simulation results for diaphragm membrane without boss shows 2.012 μm/mbar and 5.6 aF/mbar of deflection and capacitive sensitivity respectively for the range of pressure. Thermal cycle shows the variation of 8% and 3% on deflection and capacitive sensitivity.
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Document Type: Research Article
Publication date: December 1, 2013
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