Skip to main content
padlock icon - secure page this page is secure

Modeling and Analysis of High Sensitive MEMS Capacitive Differential Pressure Sensor with Polymide Diaphragm

Buy Article:

$106.34 + tax (Refund Policy)

This paper reports on modeling of high sensitive capacitive differential pressure sensor without and with bossed polymide diaphragm membrane. Analysis was carried out for center deflection sensitivity, capacitive sensitivity, effect of temperature on center deflection and capacitive sensitivity to use this sensor for the aircraft altimeter. A novel and simple structure to produce high sensitive diaphragm modeling was proposed. Capacitive differential pressure sensor principle was used in this work, where as others work reports absolute pressure sensor. The fabrication process flow of CDPS was also explained. This sensor is analyzed with constant temperature and real time parameters of pressure and temperature for aircraft flying altitude. The simulation results for diaphragm membrane without boss shows 2.012 μm/mbar and 5.6 aF/mbar of deflection and capacitive sensitivity respectively for the range of pressure. Thermal cycle shows the variation of 8% and 3% on deflection and capacitive sensitivity.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics

Document Type: Research Article

Publication date: December 1, 2013

More about this publication?
  • ADVANCED SCIENCE LETTERS is an international peer-reviewed journal with a very wide-ranging coverage, consolidates research activities in all areas of (1) Physical Sciences, (2) Biological Sciences, (3) Mathematical Sciences, (4) Engineering, (5) Computer and Information Sciences, and (6) Geosciences to publish original short communications, full research papers and timely brief (mini) reviews with authors photo and biography encompassing the basic and applied research and current developments in educational aspects of these scientific areas.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
X
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more