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Open Access EASYGaN templates: the shortcut to GaN-on-Si technology.

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The aim of the EasyGaN project is to produce an advanced "epiready" substrate called "template" to improve and facilitate the epitaxy of GaN on silicon substrate (GaN-on-Si). The objectives are to consolidate the invention, to ensure its intellectual protection and to establish the best strategy of valorization possible. At the end of the project, the EasyGaN template proved its worth with internal and external validations, confirming that it makes it possible to improve and facilitate access to GaN-on-Si technology. Two patents have been filed and other patents are in the process of maturation. This project gave birth to the EasyGaN startup, whose aim is to produce and market templates to help GaN-on-Si technology develop
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Keywords: AlN; Electronics; Epiready; GaN; HEMTs; Integration; LEDs; MEMS; Materials; Molecular beam epitaxy; Nitrides; Optoelectronics; Photonics; Silicon; Substrates; Thin film; sensors

Document Type: Research Article

Publication date: June 1, 2017

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