@article {Hamilton:1996:0305-6120:23,
title = "The Contamination Audit - A Vital Tool For Yield Improvement",
journal = "Circuit World",
parent_itemid = "infobike://mcb/217",
publishercode ="mcb",
year = "1996",
volume = "22",
number = "1",
publication date ="1996-01-01T00:00:00",
pages = "23-25",
itemtype = "ARTICLE",
issn = "0305-6120",
url = "https://www.ingentaconnect.com/content/mcb/217/1996/00000022/00000001/art00004",
keyword = "Yields, Defects, Contamination",
author = "Hamilton, S",
abstract = "With the increasing trends towards fineline circuitry, contamination has become a major cause of defects. This paper outlines the techniques used in conducting a Contamination Audit and in generating a Contamination Matrix, which is a map of the types of contamination and their relative levels within a facility. Using the Contamination Matrix contamination control measures can be targetted in the most effective manner to achieve yield improvements.",
}