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The Contamination Audit - A Vital Tool For Yield Improvement

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With the increasing trends towards fineline circuitry, contamination has become a major cause of defects. This paper outlines the techniques used in conducting a Contamination Audit and in generating a Contamination Matrix, which is a map of the types of contamination and their relative levels within a facility. Using the Contamination Matrix contamination control measures can be targetted in the most effective manner to achieve yield improvements.
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Keywords: Contamination; Defects; Yields

Document Type: Research Article

Publication date: January 1, 1996

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