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Integrated microsystem for blue/ultraviolet detection

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A fully integrated sensor microsystem for blue/ultraviolet radiation detection is presented. The photosensitive part combines a blue/UV selective stripe-shaped photodiode with a small compensation infrared photodiode. A transimpedance amplifier with 1 GΩ feedback resistor is integrated on the same silicon chip. The main features of the op amp are a low offset (<0.5mV) and fail-safe operation. This sensor has a maximal responsivity of 150 mV/nW at λ = 420 nm, corresponding to 43 percent quantum efficiency. A ratio of the responsivities at 420 nm and 1 μm as large as 560 is achieved. The system has a noise equivalent power of 5 10-13 W. The 2.2 mm2 microsystem is realized in a standard CMOS 0.5 μm process.
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Keywords: Cmos; Sensors; Uv

Document Type: Research Article

Publication date: January 1, 2000

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