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Optical fibre sensing for intelligent monitoring using chromatic methodologies

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A brief description is given of chromatic optical fibre sensing with particular reference to the monitoring of semiconductor plasma processing. Via this particular example it is shown how such chromatic sensing forms a convenient basis for interconnecting the sensing function of fibre based devices with modern signal processing methodologies enabling intelligent monitoring systems to be assembled. The generic nature of chromatic sensing is illustrated by reference to a number of sensors for addressing different measureands and the route for extending the methodology for the intelligent monitoring of high voltage circuit breakers is indicated as an example of the wider application of the approach.
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Keywords: Monitoring; Optical Fibres; Sensing Equipment; Sensors

Document Type: Research Article

Publication date: January 1, 1998

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