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Electroadhesive microgrippers

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Describes the benefits of using electroadhesion when handling very delicate, polished and/or coated optical and electro-optical microcomponents. Electroadhesion is a technique already familiar to those working in the semiconductor industry and is eminently suitable for the handling of microcomponents in air, gas or vacuum.

Keywords: Adhesion; Assembly; Handling

Document Type: Research Article

Publication date: 02 July 2003

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