Coatings Deposited by Reactive dc Magnetron Sputtering for Biomedical Applications
coatings were prepared by reactive dc magnetron sputtering in a mixture of Ti–Si–N and Ar gases onto bio implantable
316L stainless steel substrates. X‐ray diffraction analysis revealed that the N2 nanocomposite coatings are mainly composed of amorphous Ti–Si–N and Si3N4
crystals. The presence of different phases like TiN , TiN , and TiO2 was confirmed from X‐ray photoelectron spectroscopy analysis.
Raman spectra of the as‐deposited composite coatings exhibited characteristic peaks at 207.5, 305.8, 442.5, and 571.8 cm−1. Si3N4 HRTEM indicated columnar microstructure. A higher hardness value of 35 GPa for the nanocomposite coatings was observed.
The potentiodynamic polarization and electrochemical impedance spectroscopy measurements showed that the nanocomposite coatings exhibited superior corrosion resistance compared with the Ti–Si–N , Si3N4
single layer, and the bare substrate in simulated body fluid solution.
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Document Type: Research Article
Publication date: September 1, 2012