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A new route to synthesize SiCN(O) precursor is adopted with vinyl trichlorosilane and solid ammonia carbamate as starting materials. The reaction is controlled in autoclave. A mixture of solid oxygen‐rich polysilazane and ammonia chloride is obtained for the reason of dimensional poly‐condensation. It is adopted to take the byproduct apart using chemical vapor transportation. The mixture is pyrolyzed at 1100°C for 2 h in Ar, and black SiCN(O) powder is separated from the byproduct. The chemical component of the powder is Si1.00C2.07N1.09O0.29. XRD analysis indicates that the black powder keeps amorphous at a temperature up to 1450°C. At 1500°C, SiC phase is first precipitated. With the temperature further increased, Si2N2O phase appeared. It provides a way to separate other nitrides from ammonia chloride in similar system.
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Document Type: Research Article

Publication date: August 1, 2011

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