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Relationship between the Mesoporous Intermediate Layer Structure and the Gas Permeation Property of an Amorphous Silica Membrane Synthesized by Counter Diffusion Chemical Vapor Deposition

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An amorphous silica membrane with an excellent hydrogen/nitrogen (H2/N2) permselectivity of >10 000 and a He/H2 permselectivity of 11 was successfully synthesized on a -alumina (-Al2O3)-coated α-alumina (α-Al2O3) porous support by counter diffusion chemical vapor deposition using tetramethylorthosilicate and oxygen at 873 K. An amorphous silica membrane possessed a high H2 permeance of >1.0 × 10−7 mol·(m2·s·Pa)−1 at ≥773 K. The dominant permeation mechanism for He and H2 at 373–873 K was activated diffusion. On the other hand, that for CO2, Ar, and N2 at 373–673 K was a viscous flow. At ≥673 K, that for CO2, Ar, and N2 was activated diffusion. H2 permselectivity was markedly affected by the permeation temperature, thickness, and pore size of a -Al2O3 mesoporous intermediate layer.
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Document Type: Research Article

Affiliations: 1: Japan Fine Ceramics Center, Nagoya 456-8587, Japan 2: Shibaura Institute of Technology, Tokyo 135-8548, Japan 3: University of Tokyo, Tokyo 113-8656, Japan

Publication date: January 1, 2008

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