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Plasma Etching of Nano-Structured Precursor-Derived Ceramic Composites

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This paper reports on the analysis of the microstructure of precursor-derived ceramics by plasma etching and field emission scanning electron microscopy. By applying this technique, the nano-crystals in Si–C–N-based ceramics and composites can be clearly observed without difficulty.
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Document Type: Research Article

Affiliations: Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, 70569 Stuttgart, Germany

Publication date: November 1, 2005

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