Sol–Gel Preparation of Thick PZN–PZT Film Using a Diol-Based Solution Containing Polyvinylpyrrolidone for Piezoelectric Applications
Dense and crack-free lead zinc niobate–lead zirconate titanate (PZN–PZT) films were deposited on silicon and glass substrates by spin coating using a sol containing propanediol and polyvinylpyrrolidone. Single-layer PZN–PZT films as thick as 0.80 m were deposited by a single spin coating with successive heat treatments at 250° and 700°C. After heat treatment, the films were dense, crack free, and optically transparent. In addition, the crystallographic orientation of the thick film was controllable by adjusting the heat-treatment conditions. The ferroelectric properties of the (111)-oriented film were superior to those of the (100)-oriented film. On the other hand, the piezoelectric and dielectric properties of the (100)-oriented film were better than those of the (111)-oriented film. The piezoelectric coefficients (d33) of the PZN–PZT films of 4.0-m-thickness were 192 and 110 pC/N for the (100)-and (111)-oriented films, respectively.
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Document Type: Research Article
Affiliations: School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Publication date: November 1, 2005