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Deterministic Microgrinding, Lapping, and Polishing of Glass–Ceramics

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We report a series of microgrinding and polishing experiments on glass–ceramics. Microgrinding includes deterministic microgrinding (two-body abrasion at fixed infeed rate) and loose abrasive lapping (three-body abrasion at fixed pressure). We correlate material mechanical properties (Young's modulus, hardness, fracture toughness) and chemical properties (chemical susceptibility or mass loss under chemical attack) with the quality of the resulting surface (surface microroughness and surface grinding-induced residual stresses). We compare deterministic microgrinding (at fixed infeed) and loose abrasive microgrinding (at fixed pressure) in terms of material removal rates and resulting surface quality.
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Document Type: Research Article

Affiliations: 1: Zygo Corp., Middlefield, Connecticut 06455 2: Corning Inc., Corning, New York 14831

Publication date: May 1, 2005

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