An Exact Solution for the Optical Absorbance of Thin Films
The electric and magnetic fields within optical thin films are obtained exactly in closed form as solutions of a system of difference equations presented by Berning and utilized by Dill, Neureuther, Tuttle, and Walker in their sample program for modeling optical lithography. The solution allows an explicit closed form expression for the absorbance.
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Document Type: Research Article
Affiliations: Clarkson University
Publication date: October 1, 1987