Skip to main content
padlock icon - secure page this page is secure

Investigation on Interfacial Characteristics of W/Al Nanostructure

Buy Article:

$68.00 + tax (Refund Policy)

The objective of this paper is to provide a systematic investigation on design or evaluation for W/Al interface structure in micro/ nano electronic manufacturing. To understand the basic mechanical properties of the W/Al interface structure, the elastic modulus and the hardness of the sample were investigated by nanoindentation. To investigate the integrating characteristics of the sample in progress, the effect of thermal loading and no-thermal loading on the integrating force of the W/Al interface is tested by nanoscratch. The interfacial bonding force between the films can be obtained for understanding the integrating characteristics. The results show that the interfacial bonding force can be improved by thermal loading, which means the mechanical properties of W/Al interface can be modulated and modified by using thermal loading. It is significant for design and industrial manufacturing process of W/Al interface structure.
No References
No Citations
No Supplementary Data
No Article Media
No Metrics

Keywords: W/Al interface structure; mechanical properties; nanoindentation; nanoscratch

Document Type: Research Article

Publication date: October 1, 2013

More about this publication?
  • Current Nanoscience publishes authoritative reviews and original research reports, written by experts in the field on all the most recent advances in nanoscience and nanotechnology. All aspects of the field are represented including nano- structures, synthesis, properties, assembly and devices. Applications of nanoscience in biotechnology, medicine, pharmaceuticals, physics, material science and electronics are also covered. The journal is essential to all involved in nanoscience and its applied areas.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more