Micro Tactile Sensors with a Suspended and Oriented Single Walled Carbon Nanotube Beam Embedded in Polydimethylsiloxane Elastomer
A tactile sensor utilizing a patterned, aligned, and suspended SWNT film as a sensing element is reported in this paper. The sensor was prepared on both silicon and polymer substrates to expand its potential applications to different working conditions. First, a trench 10 m deep with Cr/Au electrodes on both sides of the trench was realized. Next, dense and oriented SWNT films were self-assembled using dielectrophoresis through in-situ control of the dc resistance of the film. Follow that, the SWNT film was patterned by lithography and oxygen plasma etching to prepare a suspended SWNT beam. Finally, PDMS primer was spin-coated on the structure and cured to protect the SWNT beam and realize a robust tactile sensor. In nanoindentation test, a piezoresistive sensitivity of 5%/mN and a detection limitation of 2 N were demonstrated. This simple and low temperature fabrication technology is believed to be very promising for flexible tactile sensor and sensor array in applications to smart robots, implantable clinic tools, or embedded pressure sensors in micro fluidic systems.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
Document Type: Research Article
Publication date: August 1, 2010
More about this publication?
- The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites